Freestanding epitaxial SrTiO 3 nanomembranes via remote epitaxy using hybrid molecular beam epitaxy

• DOI: 10.1126/sciadv.add5328
• Publication Date: 2022-12-23T18:58:15Z
• Authors: Hyojin Yoon; Tristan K. Truttmann; Fengdeng Liu; Bethany E. Matthews; Sooho Choo; Qun Su; Vivek Saraswat; Sebastian Manzo; Michael S. Arnold; Mark E. Bowden; Jason K. Kawasaki; Steven J. Koester; Steven R. Spurgeon; Scott A. Chambers; Bharat Jalan
• Keywords: 0303 health sciences; 03 medical and health sciences; Physical and Materials Sciences; 7. Clean energy

The epitaxial growth of functional oxides using a substrate with graphene layer is highly desirable method for improving structural quality and obtaining freestanding nanomembranes scientific study, applications, economical reuse substrates. However, the aggressive oxidizing conditions typically used in growing can damage graphene. Here, we demonstrate successful use hybrid molecular beam epitaxy SrTiO 3 that does not require an independent oxygen source, thus avoiding damage. This approach produces films self-regulating cation stoichiometry. Furthermore, film (46-nm-thick ) be exfoliated transferred to foreign These results open door future studies previously unattainable oxide grown adsorption-controlled manner by epitaxy. has potentially important implications commercial application perovskite flexible electronics as dielectric van der Waals thin-film electronics.