Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures

• DOI: 10.1126/science.1111041
• Publication Date: 2005-06-02T21:03:26Z
• Authors: Mark P. Stoykovich; Marcus Müller; Sang Ouk Kim; Harun H. Solak; Erik W. Edwards; Juan J. de Pablo; Paul F. Nealey
• Keywords: 02 engineering and technology; 0210 nano-technology; 01 natural sciences; 0104 chemical sciences

Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.