Super-tetragonal Sr 4 Al 2 O 7 as a sacrificial layer for high-integrity freestanding oxide membranes
0301 basic medicine
03 medical and health sciences
DOI:
10.1126/science.adi6620
Publication Date:
2024-01-25T18:58:30Z
AUTHORS (19)
ABSTRACT
Identifying a suitable water-soluble sacrificial layer is crucial to fabricating large-scale freestanding oxide membranes, which offer attractive functionalities and integrations with advanced semiconductor technologies. Here, we introduce a water-soluble sacrificial layer, “super-tetragonal” Sr
4
Al
2
O
7
(SAO
T
). The low-symmetric crystal structure enables a superior capability to sustain epitaxial strain, allowing for broad tunability in lattice constants. The resultant structural coherency and defect-free interface in perovskite ABO
3
/SAO
T
heterostructures effectively restrain crack formation during the water release of freestanding oxide membranes. For a variety of nonferroelectric oxide membranes, the crack-free areas can span up to a millimeter in scale. This compelling feature, combined with the inherent high water solubility, makes SAO
T
a versatile and feasible sacrificial layer for producing high-quality freestanding oxide membranes, thereby boosting their potential for innovative device applications.
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