Characterization of Mechanical Properties of Cantilevered Nd$_{2}$Fe$_{14}$B/Ta Magnetic Microstructures

• DOI: 10.1143/apex.4.116401
• Publication Date: 2011-11-12T08:36:37Z
• Authors: Yonggang Jiang; Takayuki Fujita; Minoru Uehara; Deyuan Zhang; Jun Cai; Kohei Higuchi; Kazusuke Maenaka
• Keywords: Characterization

The mechanical properties of low-stress cantilevered Nd2Fe14B/Ta multilayered microstructures are characterized. fabricated using silicon molding technique and XeF2 gas-phase etching process. magnetic microcantilevers show relatively high quality factors varying from 75 to 135. Young's modulus the film is evaluated by fitting resonance response microcantilevers, which smaller than those bulk Nd2Fe14B magnets due texture effect. good indicate that films can be used as a structural material for microsystem applications. In addition, electromagnetic driving microcantilever also demonstrated.