Photothermal Effect and Heat Dissipation in a Micromechanical Resonator

• DOI: 10.1143/apex.5.075201
• Publication Date: 2012-06-20T01:33:00Z
• Authors: Dae Hwan Kim; Eun Joong Lee; Myung Rae Cho; Chul Sung Kim; Yun Daniel Park; Taejoon Kouh
• Keywords: Photothermal effect

We describe the photothermal effect in an aluminium–silicon nitride doubly-clamped beam with optical deflection scheme. Incident power results temperature rise composite and shift resonance frequency due to thermal stress. The observed dynamic response is consistent detailed equation as well conduction model. pressure-dependent dynamics of allows investigation convective heat dissipation surrounding gas molecules determination transfer coefficient. photothermally coupled operation presented here opens up prospects for miniaturized pressure-sensing elements.