Time-Dependent Leakage Current Behavior of Integrated Ba0.7Sr0.3TiO3 Thin Film Capacitors during Stressing

• DOI: 10.1143/jjap.35.4919
• Publication Date: 2002-10-01T21:03:51Z
• Authors: Yasuhiro Shimada; Atsuo Inoue; Toru Nasu; Yoshihisa Nagano; Akihiro Matsuda; Koji Arita; Yasuhiro Uemoto; Eiji Fujii Eiji F...; Tatsuo Otsuki Tat...
• Keywords: Leakage (economics); Depletion region

Time-dependent leakage current behavior of integrated Ba 0.7 Sr 0.3 TiO 3 capacitors accelerated by stresses in excess operating temperature and voltage was studied. Current-voltage ( J - V ) studies revealed that the time-dependent behaviors are different according to initial conduction process. When a fully processed capacitor at high voltages elevated temperatures is Frenkel-Poole emission type, increases rapidly with time. The difference currents related film growth conditions which determine formation defects films. increase ascribed change mechanism from interface-controlled Schottky type bulk-related space-charge-limited due accumulation oxygen vacancies near cathode as result interface barrier lowering migration distributed across film.