Effects of Environmental Gas in UV Nanoimprint on the Characteristics of UV-Curable Resin

• DOI: 10.1143/jjap.49.06gl04
• Publication Date: 2010-06-21T06:37:44Z
• Authors: Qing Wang; Hiroshi Hiroshima
• Keywords: Shrinkage; Ultraviolet

In this study we investigated the effects of ambient gas on characteristics UV-curable resin in UV nanoimprint process by comparing pattern transfer fidelity and residual layer thicknesses samples carried out air pentafluoropropane gas. We found that shrinkage induced exposure was markedly affected environment. The reached 22% pentafluoropropane, while it only 3% air. Also, thickness were investigated. It using much thinner than could be expected from alone. believe thinning is caused not shrinkage, but also a decrease viscosity resin.