Composite Polymer Core–Ceria Shell Abrasive Particles during Oxide CMP: A Defectivity Study

• DOI: 10.1149/1.2949085
• Publication Date: 2008-07-29T14:51:08Z
• Authors: S. Armini; J. De Messemaeker; C. M. Whelan; M. Moinpour; K. Maex
• Keywords: Chemical Mechanical Planarization; Fumed silica

Ceria-based and fumed silica-based systems are compared for oxide chemical mechanical polishing (CMP) in terms of defectivity removal rate (RR). slurries yield RR ca. threefold that conventional silica but result enhanced defectivity. To reduce defectivity, composite structures comprising a 300 nm polymer core coated by 14 ceria particles have been investigated. The shows properties highly tunable variation synthesis parameters, while the major advantage coating is an action abrasive particles. We report evolution RR, root-mean-square roughness, defects during CMP experiments using different types at pH 3 10. Interestingly, two composites, achieved either silane coupling agents or electrostatic attractive interactions between coating, exhibit RR. This attributed to differences morphology surface composition. Overall, composites reduced after due springlike effect coming from elastic component core, with slurry material.