2A2-D10 Flow Metering Valve for Pneumatic Actuators Using Particle Excitation by PZT Vibrator : 9th report Confirm the optimization vibration condition for drive(Mechanism and Control for Actuator (2))

DOI: 10.1299/jsmermd.2013._2a2-d10_1 Publication Date: 2017-06-27T00:52:47Z