High Resolution Ptychographic Coherent Diffractive Imaging using Table-top XUV Sources

• DOI: 10.1364/3d.2018.jm3e.4
• Publication Date: 2018-06-18T13:29:59Z
• Authors: W. Eschen; G.K. Tadesse; R. Klas; M. Tschernajew; F. Tuitje; C. Spielmann; A. Tünnermann; J. Limpert; J. Rothhardt
• Keywords: Extreme ultraviolet; Ptychography; Coherent diffraction imaging; Table (database)

We present a coherent imaging setup for extended samples achieving record-high resolution non-periodic samples. A Siemens star pattern is imaged and the Rayleigh criterion used to provide reliable sub-50 nm claim.