Spectral diagnosis of in situ plasma cleaning in large-aperture optical components: reactive species characterization and prediction of cleaning

• DOI: 10.1364/ao.448594
• Publication Date: 2022-03-07T14:30:07Z
• Authors: Hao Liu; Yuhai Li; Longfei Niu; Peng Zhang; Xinxiang Miao; Qingshun Bai; Guorui Zhou; Xiaodong Yuan
• Keywords: Aperture (computer memory); Plasma cleaning; Characterization

The damage of large-aperture optical components caused by organic contamination limits the performance improvement high-power laser facilities. We propose an in situ plasma cleaning technology to remove contaminants on components, demonstrated simulated equipment. characteristics equipment were investigated spectral diagnosis. capability coefficient was defined evaluate Then diffusion properties reactive species along surface elucidated under various charge parameters, including powers, source frequencies, and gas pressures. discuss underlying mechanism for removing contaminants. A new model is established predict treatment time with coefficient.