Microsphere-assisted phase-shifting profilometry

• DOI: 10.1364/ao.56.007249
• Publication Date: 2017-08-29T15:33:00Z
• Authors: Stephane Perrin; Audrey Leong-Hoï; Sylvain Lecler; Pierre Pfeiffer; Ivan Kassamakov; Anton Nolvi; Edward Hæggström; Paul Montgomery
• Keywords: Interference microscopy

In the present work, we have investigated combination of a superresolution microsphere-assisted 2D imaging technique with low-coherence phase-shifting interference microscopy. The performance this is studied by numerical simulation in terms magnification and lateral resolution as function geometrical optical parameters. results simulations are compared experimental measurements reference gratings using Linnik configuration. Additional also shown on nanostructures. An improvement factor 4.7 demonstrated air, thus giving more isotropic nanometric for full-field surface profilometry far field.