Record-High-Q Microresonators from 650 nm to 1550 nm Wavelengths on a 3C-SiC-on-Insulator Platform

• DOI: 10.1364/cleo_si.2019.sth1h.5
• Publication Date: 2019-05-08T00:54:27Z
• Authors: Tianren Fan; Xi Wu; Ali A. Eftekhar; Ali Adibi
• Keywords: 02 engineering and technology; 0210 nano-technology

We report record-high-Q SiC microresonators on a 3C-SiC-on-insulator platform with ultra-low (~ 1.4 A)roughness after chemical-mechanical polishing. We demonstrate Qs of 242,000 at 1550 nm, 112,000 at 780 nm, and 83,000 at 650 nm. © 2019 The Author(s)