Silicon Nitride Fabry-Perot Bragg Grating Nanoresonator with Ultrahigh Intrinsic Q
0211 other engineering and technologies
02 engineering and technology
DOI:
10.1364/cleo_si.2022.sm4g.7
Publication Date:
2022-08-08T15:58:40Z
AUTHORS (4)
ABSTRACT
An ultra-high intrinsic quality factor (Q
int
) of 13 million for a Fabry-Perot Bragg grating resonator is demonstrated. The loss of the Si3N4 waveguide platform is evaluated to be 0.018 dB/cm.
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