Zero-Change CMOS Nanophotonics: Converting Foundry Semiconductor Chips to Plasmonic Electro-optic Modulators

• DOI: 10.1364/cleo_si.2023.sth3r.2
• Publication Date: 2023-07-27T12:24:30Z
• Authors: Mohamed ElKabbash; Isaac Harris; Sivan Trajtenberg...; Saumil Bandyopadhyay; Xibi Chen; Mohamed I. Ibrahim; Ruonan Han; Dirk Englund
• Keywords: Nanophotonics; Foundry

We create nanophotonic devices using CMOS foundry processes where the top metal layers exhibit a plasmonic resonance. By integrating liquid crystals and applying bias, we measure 20 nm resonance shift at ~700 nm.