Highly-Selective Etching of Micro-Transfer-Printed Thin-Film Lithium Niobate for Low Coupling Losses

• DOI: 10.1364/cleo_si.2024.sth3f.6
• Publication Date: 2024-09-05T18:55:13Z
• Authors: Tom Vandekerckhove; Ruben Van Assche; Ivo Tanghe; Margot Niels; Stijn Poelman; Tom Vanackere; Maximilien Billet; Stéphane Clemmen; Bart Kuyken
• Keywords: Dry etching

Efficient low-loss coupling to micro-transfer-printed lithium niobate remains a challenge. We developed highly-selective etch that enables selective etching of tapered structures into the thin film after micro-transfer printing.