Scalable cm-scale Micro-Transfer Printing for Heterogeneous Integration of Lithium Niobate

• DOI: 10.1364/fio.2023.fw5e.5
• Publication Date: 2023-12-11T14:44:41Z
• Authors: Margot Niels; Maximilien Billet; Tom Vandekerckhove; Tom Vanackere; Günther Roelkens; Bart Kuyken

Heterogeneous integration of nonlinear materials on CMOS-compatible platforms is essential to introduce high-speed modulation. We demonstrate a process to enable the printing of up to cm-scale lithium niobate devices to allow for enhanced modulation efficiency.