Pressure sensor based on multiple Fano resonance in metal–insulator–metal waveguide coupled resonator structure

• DOI: 10.1364/josab.461472
• Publication Date: 2022-05-26T13:00:07Z
• Authors: F. Chen; W. X. Yang
• Keywords: 01 natural sciences; 0104 chemical sciences

This paper presents a plasmonic pressure sensor via an optical metal–insulator–metal (MIM) waveguide structure. The proposed is composed of ring resonator, stub, and U-shaped resonator coupled to the bus waveguide. finite-difference time-domain method (FDTD) used study Fano resonance (FR) characteristics magnetic field distributions. Results show that line shapes can be independently tuned by geometrical parameters. When exerted on layer, deformation leads shift resonant wavelength. calculated maximum sensitivities are 10.96 <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mn>10</mml:mn> </mml:mrow> <mml:mn>.5</mml:mn> <mml:mspace width="thickmathspace" /> <mml:mi mathvariant="normal">n</mml:mi> mathvariant="normal">m</mml:mi> <mml:mo>/</mml:mo> mathvariant="normal">M</mml:mi> mathvariant="normal">P</mml:mi> mathvariant="normal">a</mml:mi> </mml:math> for FR 2, 3, respectively ( <mml:mo>=</mml:mo> <mml:msup> <mml:mn>6</mml:mn> </mml:msup> ). good linear relationship between wavelength indicates nano-scale structure find potential applications in fields nano-biosensing biomedical sensing.