Periodic nanohole array structure induced on a silicon surface by direct writing with a femtosecond laser

• DOI: 10.1364/jot.82.000353
• Publication Date: 2015-07-01T19:15:58Z
• Authors: D. Q. Yuan; Q. R. Wu; J. T. Xu; M. Zhou; H. F. Yang
• Keywords: 02 engineering and technology; 0210 nano-technology

A regular micro-apparatus covered with periodic nanohole, nanoridge, and ripple structures on silicon bulk (with crystal orientation of 110) was formed by micromachining a tightly focused beam femtosecond laser wavelength 800 nm, repetition rate 1 kHz, pulse length 130 fs in air. We used direct writing technology to form double-row nanohole structures, the 10× focusing objective lens (NA=0.3). investigated relationship between width speed processing provide knowledge evolution nanoridge structures.