Planar waveguides with less than 01 dB/m propagation loss fabricated with wafer bonding

• DOI: 10.1364/oe.19.024090
• Publication Date: 2011-11-10T23:46:54Z
• Authors: Jared F. Bauters; Martijn J. R. Heck; Demis D. John; Jonathon S. Barton; Christiaan M. Bru...; Arne Leinse; René G. Heideman; Daniel J. Blumenthal; John E. Bowers
• Keywords: Equipment Failure Analysis; Refractometry; Light; 0202 electrical engineering, electronic engineering, information engineering; Scattering, Radiation; Equipment Design; 02 engineering and technology; Surface Plasmon Resonance; Silicon Dioxide

We demonstrate a wafer-bonded silica-on-silicon planar waveguide platform with record low total propagation loss of (0.045 ± 0.04) dB/m near the free space wavelength of 1580 nm. Using coherent optical frequency domain reflectometry, we characterize the group index, fiber-to-chip coupling loss, critical bend radius, and propagation loss of these waveguides.