Heterogeneous lithium niobate photonics on silicon substrates

• DOI: 10.1364/oe.21.025573
• Publication Date: 2013-10-18T16:23:18Z
• Authors: Payam Rabiei; Jichi Ma; Saeed Khan; Jeff Chiles; Sasan Fathpour
• Keywords: Extinction ratio; Wafer Bonding

A platform for the realization of tightly-confined lithium niobate photonic devices and circuits on silicon substrates is reported based wafer bonding selective oxidation refractory metals. The heterogeneous employed to demonstrate high-performance microring optical resonators Mach-Zehnder modulators. quality factor ~7.2 × 10⁴ measured in microresonators, a half-wave voltage-length product 4 V.cm an extinction ratio 20 dB