High angular accuracy manufacture method of micro v-grooves based on tool alignment by on-machine measurement

• DOI: 10.1364/oe.23.027819
• Publication Date: 2015-10-14T17:22:31Z
• Authors: Xiaodong Zhang; Lili Jiang; Zhen Zeng; Fengzhou Fang; Xianlei Liu
• Keywords: 0209 industrial biotechnology; 0203 mechanical engineering; 02 engineering and technology

Micro v-groove has found wide applications in optical areas as one of the most important structures. However, its performance is significantly affected by its angular geometry accuracy. The diamond cutting has been commonly used as the fabrication method of micro v-groove, but it is still difficult to guarantee the cutting tool angle, which is limited by the measurement accuracy in the manufacture and mounting of the diamond tool. A cutting tool alignment method based on the on-machine measurement is proposed to improve the fabricated quality of the v-groove angle. An on-machine probe is employed to scan the v-groove geometrical deviation precisely. The system errors model, data processing algorithm and tool alignment methods are analyzed in details. Experimental results show that the measurement standard deviation within 0.01° can be achieved. Retro-reflection mirrors are fabricated and measured finally by the proposed method for verification.