High angular accuracy manufacture method of micro v-grooves based on tool alignment by on-machine measurement

Groove (engineering) Diamond cutting Machine tool Accuracy and precision Reflection
DOI: 10.1364/oe.23.027819 Publication Date: 2015-10-14T17:22:31Z
ABSTRACT
Micro v-groove has found wide applications in optical areas as one of the most important structures. However, its performance is significantly affected by angular geometry accuracy. The diamond cutting been commonly used fabrication method micro v-groove, but it still difficult to guarantee tool angle, which limited measurement accuracy manufacture and mounting tool. A alignment based on on-machine proposed improve fabricated quality angle. An probe employed scan geometrical deviation precisely. system errors model, data processing algorithm methods are analyzed details. Experimental results show that standard within 0.01° can be achieved. Retro-reflection mirrors measured finally for verification.
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