High angular accuracy manufacture method of micro v-grooves based on tool alignment by on-machine measurement
Groove (engineering)
Diamond cutting
Machine tool
Accuracy and precision
Reflection
DOI:
10.1364/oe.23.027819
Publication Date:
2015-10-14T17:22:31Z
AUTHORS (5)
ABSTRACT
Micro v-groove has found wide applications in optical areas as one of the most important structures. However, its performance is significantly affected by angular geometry accuracy. The diamond cutting been commonly used fabrication method micro v-groove, but it still difficult to guarantee tool angle, which limited measurement accuracy manufacture and mounting tool. A alignment based on on-machine proposed improve fabricated quality angle. An probe employed scan geometrical deviation precisely. system errors model, data processing algorithm methods are analyzed details. Experimental results show that standard within 0.01° can be achieved. Retro-reflection mirrors measured finally for verification.
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