High angular accuracy manufacture method of micro v-grooves based on tool alignment by on-machine measurement

• DOI: 10.1364/oe.23.027819
• Publication Date: 2015-10-14T17:22:31Z
• Authors: Xiaodong Zhang; Lili Jiang; Zhen Zeng; Fengzhou Fang; Xianlei Liu
• Keywords: Groove (engineering); Diamond cutting; Machine tool; Accuracy and precision; Reflection

Micro v-groove has found wide applications in optical areas as one of the most important structures. However, its performance is significantly affected by angular geometry accuracy. The diamond cutting been commonly used fabrication method micro v-groove, but it still difficult to guarantee tool angle, which limited measurement accuracy manufacture and mounting tool. A alignment based on on-machine proposed improve fabricated quality angle. An probe employed scan geometrical deviation precisely. system errors model, data processing algorithm methods are analyzed details. Experimental results show that standard within 0.01° can be achieved. Retro-reflection mirrors measured finally for verification.