Monolithic silicon-photonic platforms in state-of-the-art CMOS SOI processes [Invited]

• DOI: 10.1364/oe.26.013106
• Publication Date: 2018-05-07T20:28:55Z
• Authors: Vladimir Stojanović; Rajeev J. Ram; Milos Popović; Sen Lin; Sajjad Moazeni; Mark Wade; Chen Sun; Luca Alloatti; Amir Atabaki; Fabio Pavanello; Nandish Mehta; Pavan Bhargava
• Keywords: Optical interconnect

Integrating photonics with advanced electronics leverages transistor performance, process fidelity and package integration, to enable a new class of systems-on-a-chip for variety applications ranging from computing communications sensing imaging. Monolithic silicon is promising solution meet the energy efficiency, sensitivity, cost requirements these applications. In this review paper, we take comprehensive view performance silicon-photonic technologies developed date photonic interconnect We also present latest results our "zero-change" platforms in 45 nm 32 SOI CMOS. The indicate that processes provide "sweet-spot" adding capability enhancing integrated system beyond Moore-scaling, while being able offload major communication tasks more deeply-scaled compute memory chips without complicated 3D integration approaches.