Study of photo-ionization and thermal effects on the interaction of a nanosecond extreme ultraviolet laser with copper

• DOI: 10.1364/oe.448698
• Publication Date: 2022-01-25T10:00:09Z
• Authors: Cui Huaiyu; Li Lei; Zhao Dongdi; An Bo; Bai Yunsong; Fan Zhigang; Zhao Yongpeng
• Keywords: Nanosecond; Extreme ultraviolet; Extreme Ultraviolet Lithography; Ultraviolet

The damage mechanism of a nanosecond extreme ultraviolet (EUV) laser with solid targets is complex and involves thermal nonthermal effects. In this study, the interaction process 46.9 nm copper was investigated. A Faraday cup used to measure electron signals induced by irradiation. photo-ionization effects in are discussed according results.