High Q-factor, ultrasensitivity slot microring resonator sensor based on chalcogenide glasses

• DOI: 10.1364/oe.450092
• Publication Date: 2022-01-14T07:30:29Z
• Authors: Xuelei Zhang; Chenfeng Zhou; Ye Luo; Zhen Yang; Wei Zhang; Lan Li; Peipeng Xu; Peiqing Zhang; Tiefeng Xu
• Keywords: Cladding (metalworking); Chalcogenide glass; Q factor

In this article, the chalcogenide slot waveguide is theoretically studied, and highest power confinement factors of region cladding are obtained to be 36.3% 56.7%, respectively. A high-sensitivity microring resonator sensor designed fabricated by electron-beam lithography dry etching. The structure increases sensitivity compared with conventional evanescent field sensor. cavity has achieved a quality factor 1 × 104 fitting resonant peaks Lorentzian profile, one reported for resonators. measured 471 nm/RIU, which leads an intrinsic limit detection 3.3 10--4 RIU.