Hybrid diffractive-refractive lens for chromatic confocal measurement system

• DOI: 10.1364/oe.525475
• Publication Date: 2024-05-03T15:00:18Z
• Authors: Yulong Wang; Jie Li; Xi Hou; Lin Chen; Xin Liu; Jie Yang; Yidi Zheng
• Keywords: Chromatic aberration

A novel chromatic confocal measurement (CCM) method using a hybrid diffractive- refractive lens is presented. This designed to optimize the linearity of dispersion and minimize size optical system. The fabricated by etching diffractive surface onto quartz aspheric through lithography, which combines high numerical aperture (NA) with unique properties elements (DOE). incorporated as dispersive objective in CCM experimental system has range 514.8 µm, calibrated laser displacement interferometer. results show that wavelength-to-axial position coding achieves (R