Latest Progress and Challenges in 300 mm Monolithic Silicon Photonics Manufacturing

• DOI: 10.1364/ofc.2024.th3h.2
• Publication Date: 2024-05-14T11:37:51Z
• Authors: Takako Hirokawa; Yusheng Bian; Ken Giewont; Abdelsalam Aboketaf; Sujith Chandran; Jae-Kyu Cho; Zahidur Chowdhury; Won Suk Lee; Qidi Liu; Prateek Sharma; Massimo Sorbara; Frederick G. Ande...; Farid Barakat; Arpan Dasgupta; Kevin Dezfulian; Thomas Houghton; Jason Kim; Yarong Lin; Norman Robson; Vaibhav Ruparelia; Shenghua Song; Ryan Sporer; Teck-Jung Tang; Janet Tinkler; Helen Wong; Michelle Zhang

In this paper we discuss the latest developments in the GlobalFoundries Fotonix™ program, including enhancements in device performance, packaging, PDK compact models, and in-house test capabilities.