High-consistent and high-stable fiber-optic MEMS sensor array for accurate pressure measurement

• DOI: 10.1364/ofs.2023.w4.49
• Publication Date: 2024-02-15T16:36:40Z
• Authors: Ke Tan; Xiaoshuang Dai; Zhiyuan Li; Xueping Li; Shikai Li; Hongyu Liu; Shuang Wang; Tiegen Liu
• Keywords: Pressure measurement

A fiber optic sensor array was proposed based on a Micro-Electro-Mechanical System (MEMS) to measure spatially distributed pressure accurately. This monitoring method could be easily applied in engineering and industrial applications.