MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

• DOI: 10.1364/ol.451750
• Publication Date: 2022-01-24T14:01:14Z
• Authors: Christopher A. Di...; Paul C. V. Thrane; Firehun T. Dullo; Jo Gjessing; Anand Summanwar; Jon Tschudi
• Keywords: FOS: Physical sciences; Physics - Applied Physics; Applied Physics (physics.app-ph); 02 engineering and technology; 0210 nano-technology; 01 natural sciences; Physics - Optics; Optics (physics.optics); 0104 chemical sciences

Tunable focusing is a desired property in wide range of optical imaging and sensing technologies but has tended to require bulky components that cannot be integrated on-chip have slow actuation speeds. Recently, integration metasurfaces into electrostatic micro-electromechanical system (MEMS) architectures shown potential overcome these challenges offered limited out-of-plane displacement while requiring large voltages. We demonstrate for the first time, best our knowledge, movable metasurface lens actuated by thin-film PZT MEMS, which advantage offering displacements at low An 7.2 μm demonstrated under voltage application 23 V. This roughly twice quarter state art metasurfaces. Using this tunability, we varifocal doublet with focal shift order 250 wavelength 1.55 μm. The MEMS-metasurface promising platform miniaturized components.