MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

FOS: Physical sciences Physics - Applied Physics Applied Physics (physics.app-ph) 01 natural sciences Physics - Optics Optics (physics.optics) 0104 chemical sciences
DOI: 10.1364/ol.451750 Publication Date: 2022-01-24T14:01:14Z
ABSTRACT
Tunable focusing is a desired property in wide range of optical imaging and sensing technologies but has tended to require bulky components that cannot be integrated on-chip have slow actuation speeds. Recently, integration metasurfaces into electrostatic micro-electromechanical system (MEMS) architectures shown potential overcome these challenges offered limited out-of-plane displacement while requiring large voltages. We demonstrate for the first time, best our knowledge, movable metasurface lens actuated by thin-film PZT MEMS, which advantage offering displacements at low An 7.2 μm demonstrated under voltage application 23 V. This roughly twice quarter state art metasurfaces. Using this tunability, we varifocal doublet with focal shift order 250 wavelength 1.55 μm. The MEMS-metasurface promising platform miniaturized components.
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