MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages
FOS: Physical sciences
Physics - Applied Physics
Applied Physics (physics.app-ph)
02 engineering and technology
0210 nano-technology
01 natural sciences
Physics - Optics
Optics (physics.optics)
0104 chemical sciences
DOI:
10.1364/ol.451750
Publication Date:
2022-01-24T14:01:14Z
AUTHORS (6)
ABSTRACT
Tunable focusing is a desired property in a wide range of optical
imaging and sensing technologies but has tended to require bulky
components that cannot be integrated on-chip and have slow actuation
speeds. Recently, integration of metasurfaces into electrostatic
micro-electromechanical system (MEMS) architectures has shown
potential to overcome these challenges but has offered limited
out-of-plane displacement range while requiring large voltages. We
demonstrate for the first time, to the best of our knowledge, a
movable metasurface lens actuated by integrated thin-film PZT MEMS,
which has the advantage of offering large displacements at low
voltages. An out-of-plane displacement of a metasurface in the range
of 7.2
μ
m is demonstrated under a voltage
application of 23 V. This is roughly twice the displacement at a
quarter of the voltage of state of the art electrostatic out-of-plane
actuation of metasurfaces. Using this tunability, we demonstrate a
varifocal lens doublet with a focal shift of the order of 250
μ
m at the wavelength 1.55 μm. The
thin-film PZT MEMS-metasurface is a promising platform for
miniaturized varifocal components.
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