CMOS-foundry-based blue and violet photonics

02 engineering and technology 0210 nano-technology
DOI: 10.1364/optica.426065 Publication Date: 2021-04-14T19:29:52Z
ABSTRACT
We demonstrate a CMOS-foundry-based S i 3 N 4 photonic platform at blue and violet wavelengths that exhibits record-high intrinsic Qs of around 6 M at 453 nm and < 1 d B / c m waveguide propagation loss of around 405 nm.
SUPPLEMENTAL MATERIAL
Coming soon ....
REFERENCES (10)
CITATIONS (46)
EXTERNAL LINKS
PlumX Metrics
RECOMMENDATIONS
FAIR ASSESSMENT
Coming soon ....
JUPYTER LAB
Coming soon ....