Multi-slice ptychography with large numerical aperture multilayer Laue lenses

Ptychography Aperture (computer memory) Numerical aperture
DOI: 10.1364/optica.5.000601 Publication Date: 2018-05-07T21:05:01Z
ABSTRACT
The highly convergent x-ray beam focused by multilayer Laue lenses with large numerical apertures is used as a three-dimensional (3D) probe to image layered structures an axial separation larger than the depth of focus. Instead collecting weakly scattered high-spatial-frequency signals, depth-resolving power provided purely intense central cone diverged from beam. Using multi-slice ptychography method combined on-the-fly scan scheme, two layers nanoparticles separated 10 μm are successfully reconstructed 8.1 nm lateral resolution and dwell time low 0.05 s per point. This approach obtains high-resolution images extended field, which paves way for high throughput technique 3D imaging thick samples.
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