A New Method of Measuring Electron-hole Pairs with the PEA Method Immediately after Electron Beam Irradiation

• DOI: 10.1541/ieejfms.142.23
• Publication Date: 2021-12-31T22:27:18Z
• Authors: Kazuki Endo; Kaisei Enoki; Hiroaki Miyake; Yasuhiro Tanaka
• Keywords: Electron beam processing

In this paper, we propose the new measurement method for measuring electron-hole pairs which were generated by electron beam irradiation. High voltage was applied through vacuum gap to prevent injecting charges from electrode. addition, compared amount of pair flux beam. As a result, observed in system, and didn’t change