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Noble gas ion beams in materials science for future applications and devices

Noble gas
DOI: 10.1557/mrs.2017.185 Publication Date: 2017-09-08T07:39:21Z
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AUTHORS (6)
Alex Belianinov
Matthew J. Burch
Songkil Kim
Shida Tan
Gregor Hlawacek
Olga S. Ovchinnikova
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