High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor

• DOI: 10.18494/sam.2020.2749
• Publication Date: 2020-05-19T22:04:24Z
• Authors: Ding Jiao; Zao Ni; Jiachou Wang; Xinxin Li
• Keywords: Factor (programming language); Q factor

In this paper, we present a novel piezoelectric micromachined ultrasonic transducer (PMUT) array with high fill factor and large quality (Q).With the reusable design of etching holes, pitch between PMUTs is effectively minimized, improving array.With newly developed surface micromachining process, fabricated PMUT only needs few holes to release structure, all sealed are removed from resonance region, achieving Q.The demonstrated process facilitates low-cost volume manufacturing.As result, 50 × containing 48-μm-diameter 52 μm achieves 67%.For an individual PMUT, Q 351 achieved at center frequency 12.62 MHz, peak displacement 3.25 nm/V, effective electromechanical coupling coefficient 1.6%.The render proposed promising in applications such as flow sensing, chemical detection, energy transmission.