Heterostructure, Morphology, and Adherence Evaluation of TiO₂ Film Deposited on Stainless Steel 304 and 316L via Atomic Layer Deposition

• DOI: 10.20944/preprints202302.0133.v1
• Publication Date: 2023-02-08T06:54:23Z
• Authors: Vagner Eduardo Ma...; Lucas Augusto Man...; Angela Aparecida ...; Andre Luis de Jes...; Francisco das Cha...; Lúcia Vieira
• Keywords: Rutile; Titanium Dioxide; Deposition

Titanium dioxide (TiO2) thin films have been widely used in transparent optoelectronic devices owing to their excellent optical properties also is photocatalysis, cosmetics, and many other biomedical applications. However, a lack of studies was published on microstructure adherence comparison the TiO2 deposited both AISI substrates. In this work, were onto 304 316L stainless steel (SS) substrates via atomic layer deposition. Its heterostructure, morphology, adhesion compared looking for synergistic multifunctional properties. Raman spectroscopy mapping X-ray diffraction using Rietveld refinement method showed that are composed anatase rutile phases different percentages. Scratching tests analyze film adher-ence friction between diamond tip film, showing well adhered