Driving Conditions for Miniaturization of Micro Flow Control Valves Using Particle Excitation

• DOI: 10.20965/jrm.2025.p0135
• Publication Date: 2025-02-19T15:02:07Z
• Authors: Daisuke Hirooka; ; Naomichi Furushiro; Tomomi Yamaguchi
• Keywords: Particle (ecology); Flow Control; Control valves

In this study, we introduce research aimed at developing a compact particle-excitation flow control valve that enables continuous of air rate. We have been with for application to soft actuators. The are uses particles as plug, which does not require plug positioning function and allows the be miniaturized. Furthermore, by controlling movements on orifice, rate can made finer response improved. On other hand, past driving principle used resonant mode an oscillator utilizing piezoelectric element (PZT) motion particles. vibration mode, size limits miniaturization. Therefore, propose drive method simple plate deflection mode. This eliminates need large oscillator, thus reduces valve. To confirm feasibility proposed method, fabricated prototype evaluated its characteristics during control.