Development of a New Mems Resonant Differential Pressure Sensor with High Accuracy and High Stability

• DOI: 10.2139/ssrn.4633733
• Publication Date: 2023-11-15T06:18:18Z
• Authors: Chao Cheng; Yulan Lu; Jiahui Yao; Jian Chen; Deyong Chen; Junbo Wang
• Keywords: Differential pressure

This paper presents the design method and manufacture of a new resonant differential pressure sensor where sensitive element is assembled with packaging components through an embedded boss type stress isolation structure. The responses pressure, temperature static are theoretically modeled, which provide guidance on design. And FEA used to conduct dimensional optimization elements structures based device sensitivities effect. Fabrication bulk micromachining Au-Au bonding Au/Sn welding employed sensor. Experimental results indicate that fabricated yields high DP sensitivity −87.06 Hz/kPa, low 5.24 Hz/°C SP −0.48 Hz/kPa. Additionally, accuracy 0.05%FS reported. Furthermore, demonstrates excellent long-term stability no decrease within 15-day experiment.