MOVPE Technology of Fe-Compensated In PLayers for the Quantum Cascade Laser Applications

• DOI: 10.24425/ijet.2020.131890
• Publication Date: 2023-07-20T18:35:25Z
• Authors: Mikołaj Badura
• Keywords: quantum cascade lasers; optoelectronics; epitaxy; Telecommunication; movpe technology; Electrical engineering. Electronics. Nuclear engineering; TK5101-6720; TK1-9971

Quantum cascade laser is one of the most sophisticated semiconductor devices. Its technology requires extremely high precision and layers quality. Device performance is limited by thermal extraction form laser core. One of solutions is to apply highly resistivity epitaxial material acting as insulating layer on top of the QCL. Present work describes consequent steps of elaboration of MOVPE technology of Fe-compensated InP layers for further applications in quantum cascade lasers.