Microtribological Properties of DLC Films Prepared by Different Methods

• DOI: 10.25103/jestr.113.21
• Publication Date: 2018-10-03T09:08:39Z
• Authors: Xin Li; Hongping Zhu; ; Hui Miao
• Keywords: Diamond-like carbon; Electron cyclotron resonance; Carbon fibers

Diamond-like-carbon (DLC) films are considered ideal solid lubricating for friction reduction and anti-wear on material surfaces.However, the microtribological properties of DLC sensitive to many factors.In this study, were prepared through three techniques by using a self-made microwave-electron cyclotron resonance-plasma source ion implantation apparatus determine their under working conditions in microelectromechanical system (MEMS).The adopted unbalanced magnetron sputtering, plasma implantation, plasma-enhanced chemical vapor deposition.The diamond-like characterized X-ray photoelectron spectroscopy.The analyzed atomic force microscopy.The effects preparation techniques, slide number, load, relative sliding velocity features thin also investigated.Results reveal that load range 2-20 µN, coefficients 1.8, 1.4, 0.9 mV/nN.The have lower than Si surface (2.6 mV/nN).Under same loading conditions, changes frictional related slope rough peak, increase is proportional square slope.The wearing depth nonlinearly number wear cycles, resistance film worse deeper layers.Sliding slightly affects when normal several nanonewtons.This study provides references application modification MEMS devices.