TUNABLE BAND-PASS FILTER USING RF MEMS CAPACITANCE AND TRANSMISSION LINE

• DOI: 10.2528/pierc11070607
• Publication Date: 2011-09-06T14:55:22Z
• Authors: Shimul Chandra Saha; Ulrik Hanke; Hakon Sagberg; Tor A. Fjeldly; Trond Saether
• Keywords: 0202 electrical engineering, electronic engineering, information engineering; 02 engineering and technology; 7. Clean energy

In this paper we present the design and fabrication of an RF MEMS tunable band-pass fllter. The band-pass fllter design uses both distributed transmission lines and RF MEMS capacitances together to replace the lumped elements. The use of RF MEMS variable capacitances gives the ∞exibility of tuning both the centre frequency and the band-width of the band-pass fllter. A prototype of the tunable band-pass fllter is realized using parallel plate capacitances. The variable shunt and series capacitances are formed by a combination of parallel plate RF MEMS shunt bridges and series cantilevers. The fllter operates at C-X band. The measurement results agree well with the simulation results.