MICRO-SCALE DIAMOND HEMISPHERICAL RESONATOR GYROSCOPE

• DOI: 10.31438/trf.hh2014.77
• Publication Date: 2019-03-31T17:01:56Z
• Authors: P. Taheri-Tehrani; T.-H. Su; A. Heidari; G. Jaramillo; C. Yang; S. Akhbari; H. Najar; S. Nitzan; D. Saito; L. Lin; D.A. Horsley
• Keywords: Helical resonator; Q factor

This paper concerns a micro-scale gyroscope based on 1 mm diameter diamond hemispherical resonator with embedded polysilicon electrodes.Frequency mismatch and quality factor of the wineglass vibration modes are studied.The device has electrodes used for electrostatic transduction mode-matching.The air gap between is small to increase frequency tuning range given supply voltage.The 2θ-mode resonant can be minimized from 2.4% 0.1% by applying low 2.5V voltage.