Study of DC Magnetron Sputtered Nb Films

• DOI: 10.3390/cryst12010031
• Publication Date: 2021-12-27T06:00:54Z
• Authors: He Gao; Shijian Wang; Da Xu; Xueshen Wang; Qing Zhong; Yuan Zhong; Jinjin Li; Wenhui Cao
• Keywords: Lattice constant; Cavity magnetron

As Nb films are widely used as superconducting electrodes of Josephson junctions, it is important to investigate the properties in order fabricate high-quality junctions. In this work, we conducted a comprehensive analysis relationships among DC magnetron sputtered with constant power fabricated at National Institute Metrology (China). The film properties, including superconductivity, stress, lattice constant, and surface roughness, were investigated. It was found that case Ar pressure, stress other parameters can maintain relatively stable state during continuous consumption target material.