Extreme Ultraviolet Stokesmeter for Pulsed Magneto-Optics

• DOI: 10.3390/photonics2010241
• Publication Date: 2015-02-16T15:30:38Z
• Authors: Mabel Ruiz-Lopez; Francesco Barbato; Yasin Ekinci; Davide Bleiner
• Keywords: Extreme Ultraviolet Lithography; Extreme ultraviolet; Brewster's angle; Reflection; Stokes parameters

Several applications in material science and magnetic holography using extreme ultraviolet (EUV) radiation require the measurement of degree state polarization. In this work, an instrument to measure simultaneously both parameters from EUV pulses is presented. The determines Stokes after a reflection on array multilayer mirrors at Brewster angle. Stokesmeter was tested Swiss Light Source different wavelengths. experimental patterns source were compared with simulated pattern.