Investigation of Composite Structure with Dual Fabry–Perot Cavities for Temperature and Pressure Sensing

Silicone rubber Polydimethylsiloxane Pressure measurement Diaphragm (acoustics)
DOI: 10.3390/photonics8050138 Publication Date: 2021-04-25T01:49:20Z
ABSTRACT
To deeply analyze the influence of diaphragm materials on temperature and pressure sensitivity Fabry–Perot interferometer-based dual-parameter fiber sensors, multiple transfer method was used to fabricate dual cavities, respectively, consisting following combinations: epoxy resin AB/polydimethylsiloxane (PDMS), Ecoflex0030 silicone rubber /PDMS, PDMS/Ecoflex0030 rubber. Experimental results show that sensitivities are, 528, 540, 1033 pm/°C in range 40–100 °C. Within applied 100–400 kPa, 16.0, 34.6, 30.2 pm/kPa. The proposed sensors have advantages proper sensitivity, simple fabrication, cost-effectiveness, controllable cavity length, suitability for practical sensing applications.
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