Study of a Mixed Conductive Layer Fabricated by Ion Implantation and Distribution Theory

ion implantation; mixed conductive layer; distribution theory 02 engineering and technology 0210 nano-technology 7. Clean energy Article
DOI: 10.3390/polym15020270 Publication Date: 2023-01-05T08:12:15Z
ABSTRACT
Electrodes are essential parts of capacitors that can consist a variety materials depending on the application. In dielectric elastomer transducers (DETs)—a type special variable capacitor—the electrode needs to deform with soft base. However, current carbon-based electrodes not stable, and metal-based ones flexible for use in DETs. Thus, need fabricate an which meet both stability flexibility requirements is extremely important. this work, silver ions energy levels 40 keV were implanted into surface polydimethylsiloxane (PDMS) explore effect ion implantation conductivity. The experimental results showed resistivity PDMS reached 251.85 kΩ per square dropped by 10 orders magnitude after implantation. This indicates conductivity was significantly improved. EDS characterization maximum penetration depth could reach about 2.5 μm. sample coated carbon black further reduced order changed more stably time. A quasi-melting-collision model established investigate distribution particles. concentration particles at distance from followed Gaussian-like distribution.
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