SnO2/Pt Thin Film Laser Ablated Gas Sensor Array

• DOI: 10.3390/s110807724
• Publication Date: 2011-08-05T16:29:59Z
• Authors: Mohammad Hadi Sha...; Mohd Nizar Hamidon; Abdul Halim Shaari; Norhafizah Abdullah; Rahman Wagiran
• Keywords: Pulsed Laser Deposition; Laser Ablation; Tin oxide; Deposition

A gas sensor array was developed in a 10 × mm(2) space using Screen Printing and Pulse Laser Ablation Deposition (PLAD) techniques. Heater, electrode, an insulator interlayer were printed the screen printing method on alumina substrate, while tin oxide platinum films, as sensing catalyst layers, deposited electrode at room temperature PLAD method, respectively. To ablate SnO(2) Pt targets, depositions achieved by 1,064 nm Nd-YAG laser, with power of 0.7 J/s, different deposition times 2, 5 min, atmosphere containing 0.04 mbar (4 kPa) O(2). range spectroscopic diffraction real imaging techniques, SEM, EDX, XRD, AFM used order to characterize surface morphology, structure, composition films. Measurement shows sensitivity some solvent wood smoke can be short response recovery times.