Influence of Electrostatic Forces on the Vibrational Characteristics of Resonators for Coriolis Vibratory Gyroscopes

• DOI: 10.3390/s20010295
• Publication Date: 2020-01-06T08:48:48Z
• Authors: Pengbo Xiao; Zhinan Qiu; Yao Pan; Shaoliang Li; Tianliang Qu; Zhongqi Tan; Jianping Liu; Kaiyong Yang; Wanliang Zhao; Hui Luo; Shiqiao Qin
• Keywords: Q factor; Natural frequency; Allan variance

The Coriolis Vibratory Gyroscopes are a type of sensors that measure angular velocities through the effect. resonator is critical component CVGs, vibrational characteristics which, including resonant frequency, frequency mismatch, Q factor, and factor asymmetry, have great influence on performance CVG. mismatch resonator, in particular, directly determine precision drift gyroscope. Although natural properties they can change with external conditions, such as temperature, pressure, forces. In this paper, electrostatic forces fused silica cylindrical investigated. Experiments were performed coated Cr/Au films. It was shown decay time slightly decreased forces, while split increased. Lower capacitive gaps larger applied voltages resulted lower time. This phenomenon theoretically analyzed, variation trends results consistent theoretical analysis. study indicates that, for transduction, although small, should be considered when designing gap choosing bias voltages.