High-Efficiency Dynamic Terahertz Deflector Utilizing a Mechanically Tunable Metasurface

• DOI: 10.34133/research.0274
• Publication Date: 2023-11-13T16:27:10Z
• Authors: Zhenci Sun; Chao Liang; Chen Chen; Xiayu Wang; Enze Zhou; Xiaomeng Bian; Yuanmu Yang; Rui You; Xiaoguang Zhao; Jiahao Zhao; Zheng You
• Keywords: Beam steering

Terahertz (THz) wave manipulation, especially the beam deflection, plays an essential role in various applications, such as next-generation communication, space exploration, and high-resolution imaging. Current THz optical components devices are hampered by their large bulk sizes passive responses, limiting development of high-performance, miniaturized microsystems. Tunable metasurfaces offer a powerful dynamic platform for controlling propagation electromagnetic waves. In this article, we presented mechanically tunable metasurface (MTM), which can achieve terahertz deflection vary intensity anomalous reflected changing air gap between metallic resonator (MR) array with phase discontinuities Au ground plane. The absence lossy spacer materials substantially enhances efficiency. device was fabricated combination surface bulk-micromachining processes. steering capability characterized using time domain spectroscopy. When is 50 μm, maximum coefficient reaches 0.60 at 0.61 angle ~44.5°, consistent theoretical predictions. We further established electrically introducing micro voice coil motor to control continuously. It shown that our designed MTM demonstrates high modulation depth (~ 62.5%) target steered operating frequency. Our results showcase potential proposed high-efficiency manipulation.