Physics-based virtual coherence scanning interferometer for surface measurement

• DOI: 10.37188/lam.2021.009
• Publication Date: 2021-02-26T09:17:25Z
• Authors: Rong Su; Richard Leach
• Keywords: 0103 physical sciences; 01 natural sciences

Virtual instruments provide task-specific uncertainty evaluation in surface and dimensional metrology. We demonstrate the first virtual coherence scanning interferometer that can accurately predict results from measurements of surfaces with complex topography using a specific real instrument. The instrument is powered by physical models derived principles, including surface-scattering models, three-dimensional imaging theory, error-generation models. By incorporating influences various error sources directly into interferogram before reconstructing surface, works same manner as To enhance fidelity measurement, experimentally determined transfer function configuration used to characterise Finally, we experimental validation instrument, followed predictions for several typical are within validity regime