Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings

• DOI: 10.3788/col201614.090501
• Publication Date: 2016-10-20T06:03:37Z
• Authors: Yuanfang Li Yuanf...; Huoyao Chen Huoya...; Stefanie Kroker S...; Thomas Ksebier Th...; Zhengkun Liu Zhen...; Keqiang Qiu Keqia...; Ying Liu Ying Liu; Ernst-Bernhard Kl...; Xiangdong Xu Xian...; Yilin Hong Yilin ...; and Shaojun Fu a...
• Keywords: Anti-reflective coating; Diffraction efficiency; Angular spectrum method

Near-field holography (NFH), with its virtues of precise critical dimensions and high throughput, has a great potential for the realization soft x-ray diffraction gratings. We show that NFH reflections reduced by integration antireflective coatings (ARCs) simplifies process relative to setups using refractive index liquids. Based on proposed ARCs, gold-coated laminar gratings were fabricated subsequent ion beam etching. The efficiency angular spectrum shows stray light is one level magnitude suppression interface during NFH.